polishing pad
Polishing pad
Polishing pad is also known as polishing skin, polishing cloth, polishing sheet, chemical mechanical polishing of the surface quality of the important auxiliary materials.
Polishing pad in Chinese, Polishing cloth in foreign languages
According to whether there is abrasive polishing pad is divided into abrasive polishing pad and abrasive polishing pad
According to the surface structure plane type, grid type and spiral type
classification
According to whether it contains abrasives, it can be divided into abrasive polishing pad and abrasive polishing pad; According to the different materials can be divided into polyurethane polishing pad, non-woven polishing pad and composite polishing pad; According to the different surface structure can be roughly divided into plane type, grid type and spiral type.
function
(1) The polishing liquid is effectively and evenly transported to different areas of the polishing pad;
② the chemical reaction will be fully carried out after polishing; The reactants, debris and so on are discharged smoothly to achieve the removal effect;
(3) Maintain the polishing liquid film on the surface of the polishing pad so that the chemical reaction can be fully carried out;
(4) To maintain the smooth polishing process without surface deformation, in order to obtain a better surface morphology of the wafer;
Influencing factor
(1) Hardness - the hardness of polishing pad determines the ability to maintain the accuracy of surface shape;
② Compression ratio - compression ratio reflects the deformation resistance of polishing pad;
(3) Conservation - the conservation of polishing pad is the quality of polishing liquid stored by unit volume of polishing pad;
(4) Roughness - surface roughness is the degree of roughness of the surface of polishing pad;
⑤ Density - density is the density of polishing pad material;